검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
The influence of the filament temperature on the structure of hot-wire deposited silicon van der Werf CHM, van Veenendaal PATT, van Veen MK, Hardeman AJ, Rusche MYS, Rath JK, Schropp REI Thin Solid Films, 430(1-2), 46, 2003 |
| 2 |
Deposition of HWCVD poly-Si films at a high growth rate Rath JK, Hardeman AJ, van der Werf CHM, van Veenendaal PATT, Rusche MYS, Schropp REI Thin Solid Films, 430(1-2), 67, 2003 |
| 3 |
Investigation of scaling-up issues in hot-wire CVD of polycrystalline silicon van der Werf CHM, Hardeman AJ, van Veenendaal PATT, van Veen MK, Rath JK, Schropp REI Thin Solid Films, 427(1-2), 41, 2003 |