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| No. | Article |
|---|---|
| 1 |
Non-Contact and Non-Destructive Characterization Alternatives of Ultra-Shallow Implanted Silicon p-n Junctions by Multi-Wavelength Raman and Photoluminescence Spectroscopy Yoo WS, Ueda T, Ishigaki T, Kang K, Fukumoto M, Hasuike N, Harima H, Yoshimoto M Journal of the Electrochemical Society, 158(1), H80, 2011 |