검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Influence of sticking coefficients on the behavior of sputtered atoms in an argon glow discharge : Modeling and comparison with experiment Bogaerts A, Naylor J, Hatcher M, Jones WJ, Mason R Journal of Vacuum Science & Technology A, 16(4), 2400, 1998 |