검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Removal of submicrometer particles from silicon wafer surfaces using HF-based cleaning mixtures Vos R, Lux M, Xu K, Fyen W, Kenens C, Conard T, Mertens P, Heyns M, Hatcher Z, Hoffman M Journal of the Electrochemical Society, 148(12), G683, 2001 |