검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Depth profile analysis of ultrathin silicon oxynitride films by ToF-SIMS Douglas MA, Hattangady S, Eason K Journal of the Electrochemical Society, 147(5), 1893, 2000 |
| 2 |
Modeling and optimization of oxynitride gate dielectrics formation by remote plasma nitridation of silicon dioxide Kapila D, Hattangady S, Douglas M, Kraft R, Gribelyuk M Journal of the Electrochemical Society, 146(3), 1111, 1999 |
| 3 |
Surface Nitridation of Silicon Dioxide with a High-Density Nitrogen Plasma Kraft R, Schneider TP, Dostalik WW, Hattangady S Journal of Vacuum Science & Technology B, 15(4), 967, 1997 |