화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Double SIMOX structures formed by sequential high energy oxygen implantation into silicon
Hatzopoulos N, Skorupa W, Siapkas DI
Journal of the Electrochemical Society, 147(1), 354, 2000
2 Structural and Compositional Characterization of High-Energy Separation by Implantation of Oxygen Structures Using Infrared-Spectroscopy
Siapkas DI, Hatzopoulos N, Katsidis CC, Zorba T, Mitsas CL, Hemment PL
Journal of the Electrochemical Society, 143(9), 3019, 1996
3 Optical Investigation of Structures Formed by 2 MeV Oxygen Implantation into Silicon
Hatzopoulos N, Siapkas DI, Hemment PL
Thin Solid Films, 289(1-2), 90, 1996