검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Advanced selective dry etching of GaAs/AlGaAs in high density inductively coupled plasmas Lee JW, Devre MW, Reelfs BH, Johnson D, Sasserath JN, Clayton F, Hays D, Pearton SJ Journal of Vacuum Science & Technology A, 18(4), 1220, 2000 |
| 2 |
A laboratory study of the mechanism of coking pressure generation Barriocanal C, Hays D, Patrick JW, Walker A Fuel, 77(7), 729, 1998 |
| 3 |
Inductively-Coupled Ar Plasma Damage in AlGaAs Lee JW, Hays D, Abernathy CR, Pearton SJ, Hobson WS, Constantine C Journal of the Electrochemical Society, 144(9), L245, 1997 |