검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Microlithography by Using Neutral Metastable Atoms and Self-Assembled Monolayers Berggren KK, Bard A, Wilbur JL, Gillaspy JD, Helg AG, Mcclelland JJ, Rolston SL, Phillips WD, Prentiss M, Whitesides GM Science, 269(5228), 1255, 1995 |