검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Microcrystalline silicon film deposition from H-2-He-SiH4 using remote plasma enhanced chemical vapor deposition Lee SW, Heo DC, Kang JK, Park YB, Rhee SW Journal of the Electrochemical Society, 145(8), 2900, 1998 |
| No. | Article |
|---|---|
| 1 |
Microcrystalline silicon film deposition from H-2-He-SiH4 using remote plasma enhanced chemical vapor deposition Lee SW, Heo DC, Kang JK, Park YB, Rhee SW Journal of the Electrochemical Society, 145(8), 2900, 1998 |