검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
On the problem of rotational-state-dependent molecule-surface interaction: Relaxation, accommodation and trapping at low J Pankov AY, Krylov SY, van Duijn EJ, Hermans LJF Journal of Chemical Physics, 112(19), 8680, 2000 |
| 2 |
Etching of Si through a thick condensed XeF2 layer Sebel PGM, Hermans LJF, Beijerinck HCW Journal of Vacuum Science & Technology A, 18(5), 2090, 2000 |
| 3 |
Reaction layer dynamics in ion-assisted Si/XeF2 etching: Temperature dependence Sebel PGM, Hermans LJF, Beijerinck HCW Journal of Vacuum Science & Technology A, 18(6), 2759, 2000 |
| 4 |
Silicon etch rate enhancement by traces of metal Sebel PGM, Hermans LJF, Beijerinck HCW Journal of Vacuum Science & Technology A, 17(3), 755, 1999 |
| 5 |
Reaction layer dynamics in ion-assisted Si/XeF2 etching: Ion flux dependence Sebel PGM, Hermans LJF, Beijerinck HCW Journal of Vacuum Science & Technology A, 17(6), 3368, 1999 |
| 6 |
Rotational- and vibrational-state resolved HF-surface interactions investigated by surface light-induced drift vanDuijn EJ, Nokhai R, Hermans LJF, Pankov AY, Krylov SY Journal of Chemical Physics, 107(10), 3999, 1997 |