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| No. | Article |
|---|---|
| 1 |
Secondary-Ion Mass-Spectroscopy Ultrashallow Depth Profiling for Si/Si1-xGex/Si Heterojunction Bipolar-Transistors Kruger D, Kurps R, Heinemann B, Herzel F, Zeindl HP Journal of Vacuum Science & Technology B, 14(1), 287, 1996 |