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| No. | Article |
|---|---|
| 1 |
Features of oxide layer formation in high-aspect slot structures by means of MOCVD Shevtsov YV, Kuchumov BM, Kruchinin VN, Spesivtsev EV, Golovnev IF, Igumenov IK Journal of Crystal Growth, 414, 135, 2015 |
| No. | Article |
|---|---|
| 1 |
Features of oxide layer formation in high-aspect slot structures by means of MOCVD Shevtsov YV, Kuchumov BM, Kruchinin VN, Spesivtsev EV, Golovnev IF, Igumenov IK Journal of Crystal Growth, 414, 135, 2015 |