검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Equipment Simulation of SiGe Heteroepitaxy - Model Validation by Ab-Initio Calculations of Surface-Diffusion Processes Hierlemann M, Werner C, Spitzer A Journal of Vacuum Science & Technology B, 15(4), 935, 1997 |
| 2 |
A Reduced-Fluid Dynamic Discharge Model for Applications in Technology-Oriented Computer-Aided-Design Brinkmann RP, Furst R, Werner C, Hierlemann M Journal of the Electrochemical Society, 143(6), 1940, 1996 |
| 3 |
Computational Chemistry Predictions of Kinetics and Major Reaction Pathways for Germane Gas-Phase Reactions Simka H, Hierlemann M, Utz M, Jensen KF Journal of the Electrochemical Society, 143(8), 2646, 1996 |
| 4 |
A Gas-Phase and Surface Kinetics Model for Silicon Epitaxial-Growth with Sih2Cl2 in an Rtcvd Reactor Hierlemann M, Kersch A, Werner C, Schafer H Journal of the Electrochemical Society, 142(1), 259, 1995 |