검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Structural and optical properties of post-annealed atomic-layer-deposited HfO2 thin films on GaAs Bennett NS, Cherkaoui K, Wong CS, O'Connor E, Monaghan S, Hurley P, Chauhan L, McNally PJ Thin Solid Films, 569, 104, 2014 |
| 2 |
Effect of deposition temperature on the properties of CeO2 films grown by atomic layer deposition King PJ, Werner M, Chalker PR, Jones AC, Aspinall HC, Basca J, Wrench JS, Black K, Davies HO, Heys PN Thin Solid Films, 519(13), 4192, 2011 |
| 3 |
A study on the etch characteristics of HfAlO3 dielectric thin film in Cl-2/Ar gas chemistry using inductively coupled plasma system Woo JC, Ha TK, Um DS, Park J, Kang YC, Kim CI Thin Solid Films, 520(3), 1141, 2011 |