화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Ultrahigh-Resolution Chirped Distributed-Feedback Gratings Fabricated by Electron-Beam Lithography Using Bent Wave-Guides for Low-Cost Photonic Components
Hillmer H, Burkhard H, Seebald E, Kiesel K
Journal of Vacuum Science & Technology B, 13(6), 2853, 1995
2 Investigations of Artificial Nanostructures and Lithography Techniques with a Scanning Probe Microscope
Griesinger UA, Kaden C, Lichtenstein N, Hommel J, Lehr G, Bergmann R, Menschig A, Schweizer H, Hillmer H, Koops HW, Kretz J, Rudolph M
Journal of Vacuum Science & Technology B, 11(6), 2441, 1993