검색결과 : 1건
No. | Article |
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1 |
Determination of the electrical properties of ultrathin silicon-based dielectric films: thermally grown SiNx Pic N, Glachant A, Nitsche S, Hoarau JY, Goguenheim D, Vuillaume D, Sibai A, Chaneliere C Solid-State Electronics, 45(8), 1265, 2001 |