검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High-Temperature Deposition of Sin Films Using Low-Pressure Chemical-Vapor-Deposition System for X-Ray Mask Application Ohta T, Kumar R, Yamashita Y, Hoga H Journal of Vacuum Science & Technology B, 12(2), 585, 1994 |
| No. | Article |
|---|---|
| 1 |
High-Temperature Deposition of Sin Films Using Low-Pressure Chemical-Vapor-Deposition System for X-Ray Mask Application Ohta T, Kumar R, Yamashita Y, Hoga H Journal of Vacuum Science & Technology B, 12(2), 585, 1994 |