검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Introduction of zirconium oxide in a hardmask concept for highly selective patterning of scaled high aspect ratio trenches in silicon Paul J, Riedel S, Rudolph M, Wege S, Czernohorsky M, Sundqvist J, Hohle C, Beyer V Thin Solid Films, 520(14), 4527, 2012 |
| 2 |
Detailed characterization of hydrogen silsesquioxane for e-beam applications in a dynamic random access memory pilot line environment Keil K, Choi KH, Hohle C, Kretz J, Szikszai L, Bartha JW Journal of Vacuum Science & Technology B, 27(1), 47, 2009 |
| 3 |
Evaluation of hybrid lithography and mix and match scenarios for electron beam direct write applications Hohle C, Arndt C, Choi KH, Kretz J, Lutz T, Thrum F, Keil K Journal of Vacuum Science & Technology B, 25(6), 2038, 2007 |
| 4 |
Influence of the charge transport characteristics on the holographic response of organic photorefractive materials Zilker SJ, Hofmann U, Leopold A, Grasruck M, Hohle C, Strohriegl P Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals, 358, 15, 2001 |
| 5 |
Correlation between dispersivity of charge transport and holographic response time in an organic photorefractive glass Hofmann U, Grasruck M, Leopold A, Schreiber A, Schloter S, Hohle C, Strohriegl P, Haarer D, Zilker SJ Journal of Physical Chemistry B, 104(16), 3887, 2000 |