검색결과 : 1건
No. | Article |
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1 |
Diborane nitrogen/ammonia plasma chemistry investigated by infrared absorption spectroscopy Franz D, Hollenstein M, Hollenstein C Thin Solid Films, 379(1-2), 37, 2000 |
No. | Article |
---|---|
1 |
Diborane nitrogen/ammonia plasma chemistry investigated by infrared absorption spectroscopy Franz D, Hollenstein M, Hollenstein C Thin Solid Films, 379(1-2), 37, 2000 |