검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Developments in equipment support technology Sullivan JJ, Gwizdak R, Gu Y, Culwell W, Baker JM, Hosch JW Journal of Vacuum Science & Technology A, 16(3), 1842, 1998 |
| 2 |
Multiparameter Grating Metrology Using Optical Scatterometry Raymond CJ, Murnane MR, Prins SL, Sohail S, Naqvi H, Mcneil JR, Hosch JW Journal of Vacuum Science & Technology B, 15(2), 361, 1997 |