검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Importance of H-2 gas for growth of hot-wire CVD nanocrystalline 3C-SiC from SiH4/CH4/H-2 Hoshide Y, Komura Y, Tabata A, Kitagawa A, Kondo A Thin Solid Films, 517(12), 3520, 2009 |
| 2 |
Preparation of n-type nanocrystalline 3C-SiC films by hot-wire CVD using N-2 as doping gas Hoshide Y, Tabata A, Kitagawa A, Kondo A Thin Solid Films, 517(12), 3524, 2009 |