검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Patterning Accuracy Estimation During Stage Acceleration in the Electron-Beam Direct Writing System Ex-8D Hattori K, Magoshi S, Ando A, Satoh S, Sunaoshi H, Suenaga M, Housai H, Hashimoto S, Wada H, Sugihara K Journal of Vacuum Science & Technology B, 14(6), 3985, 1996 |
| 2 |
Patterning Accuracy Improvement of the Electron-Beam Direct Writing System Ex-8D Yoshikawa R, Hattori K, Wada H, Magoshi S, Sunaoshi H, Ando A, Yamaguchi T, Mikami S, Nishimura S, Housai H, Hashimoto S, Takigawa T Journal of Vacuum Science & Technology B, 13(6), 2493, 1995 |
| 3 |
Electron-Beam Direct Writing System Ex-8D Employing Character Projection Exposure Method Hattori K, Yoshikawa R, Wada H, Kusakabe H, Yamaguchi T, Magoshi S, Miyagaki A, Yamasaki S, Takigawa T, Kanoh M, Nishimura S, Housai H, Hashimoto S Journal of Vacuum Science & Technology B, 11(6), 2346, 1993 |