검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effect of surface reactive site density and reactivity on the growth of atomic layer deposited WNxCy films Hoyas AM, Whelan CM, Schuhmacher J, Celis JP, Maex K Electrochemical and Solid State Letters, 9(7), F64, 2006 |
| 2 |
Effect of plasma treatments on a low-k dielectric polymer surface Hoyas AM, Schuhmacher J, Whelan CM, Baklanov MR, Carbonell L, Celis JP, Maex K Journal of Vacuum Science & Technology B, 23(4), 1551, 2005 |