검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Reactive Ion Etching GaAs and AlAs - Kinetics and Process Monitoring Franz G, Hoyler C, Kaindl J Journal of Vacuum Science & Technology B, 14(1), 126, 1996 |
| No. | Article |
|---|---|
| 1 |
Reactive Ion Etching GaAs and AlAs - Kinetics and Process Monitoring Franz G, Hoyler C, Kaindl J Journal of Vacuum Science & Technology B, 14(1), 126, 1996 |