검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Reactive and anisotropic etching of magnetic tunnel junction films using pulse-time-modulated plasma Mukai T, Hshirna N, Hada H, Samukawa S Journal of Vacuum Science & Technology A, 25(3), 432, 2007 |
| No. | Article |
|---|---|
| 1 |
Reactive and anisotropic etching of magnetic tunnel junction films using pulse-time-modulated plasma Mukai T, Hshirna N, Hada H, Samukawa S Journal of Vacuum Science & Technology A, 25(3), 432, 2007 |