검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Formation of low resistivity alpha Ta by ion beam sputtering Zhang JQ, Huai YM, Chen LF, Zhang J Journal of Vacuum Science & Technology B, 21(1), 237, 2003 |
| No. | Article |
|---|---|
| 1 |
Formation of low resistivity alpha Ta by ion beam sputtering Zhang JQ, Huai YM, Chen LF, Zhang J Journal of Vacuum Science & Technology B, 21(1), 237, 2003 |