검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Correlation between the composition, structure and properties of dual ion beam deposited SiNx films Tsang MR, Ong CW, Choy CL, Lim PK, Hung WW Thin Solid Films, 424(1), 143, 2003 |
| 2 |
Mechanical and etching properties of dual ion beam deposited hydrogen-free silicon nitride films Tsang MP, Ong CW, Chong N, Choy CL, Lim PL, Hung WW Journal of Vacuum Science & Technology A, 19(5), 2542, 2001 |