화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Ion-beam-sputter deposited titanium nitride thin films for conductive atomic force microscope probes
Su PJ, Liu BH
Thin Solid Films, 529, 317, 2013
2 Effects of deposition and post-annealing conditions on electrical properties and thermal stability of TiAlN films by ion beam sputter deposition
Lee SY, Wang SC, Chen JS, Huang JL
Thin Solid Films, 515(3), 1069, 2006
3 Si doped SiO2 glass light emitter within an optical cavity fabricated by ion beam sputter-deposition
Ichinohe T, Kenmochi D, Morisaki H, Masaki S, Kawasaki K
Thin Solid Films, 377-378, 87, 2000