검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Blistering mechanism for the crater formation at Ta/Si interface by sputtering with oxygen ion beam Kim KJ, Moon DW, Jung KH Journal of Vacuum Science & Technology A, 16(5), 2919, 1998 |
| No. | Article |
|---|---|
| 1 |
Blistering mechanism for the crater formation at Ta/Si interface by sputtering with oxygen ion beam Kim KJ, Moon DW, Jung KH Journal of Vacuum Science & Technology A, 16(5), 2919, 1998 |