화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Simple Equipment Tolerant Reflectometry for Monitoring of Molecular-Beam Epitaxy and Metalorganic Chemical-Vapor-Deposition Growth
Bean JC, Peticolas LJ, Lum R, Mcdonald ML
Journal of Vacuum Science & Technology A, 14(3), 946, 1996
2 Characterization of Substrate-Temperature and Damage in Diamond Growth Plasmas by Multichannel Spectroellipsometry
Wakagi M, Hong BG, Nguyen HV, Collins RW, Drawl W, Messier R
Journal of Vacuum Science & Technology A, 13(4), 1917, 1995