검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Methodology for the Certification of Reference Specimens for Determination of Oxygen Concentration in Semiconductor Silicon by Infrared Spectrophotometry Rennex BG, Ehrstein JR, Scace RI Journal of the Electrochemical Society, 143(1), 258, 1996 |
| 2 |
Accurate Evaluation Techniques of Interstitial Oxygen Concentrations in Medium-Resistivity Si Crystals Kitagawara Y, Tamatsuka M, Takenaka T Journal of the Electrochemical Society, 141(5), 1362, 1994 |