검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Physical and electrical characterization of high-k ZrO2 metal-insulator-metal capacitor Kim JH, Ignatova V, Kuecher P, Heitmann J, Oberbeck L, Schroder U Thin Solid Films, 516(23), 8333, 2008 |
| 2 |
Modeling of the target surface modification by reactive ion implantation during magnetron sputtering Depla D, Chen ZY, Bogaerts A, Ignatova V, De Gryse R, Gijbels R Journal of Vacuum Science & Technology A, 22(4), 1524, 2004 |
| 3 |
Segregation of gallium at SiO2/Si interfaces during sputtering with Ga+ ions: experimental and computer simulation study Ignatova V, Chakarov I, Torrisi A, Licciardello A Applied Surface Science, 187(1-2), 145, 2002 |