검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Roles of Ion Irradiation for Crystalline Growth and Internal-Stresses in Nickel Films Onto Silicon Substrates Prepared by the Ion-Beam and Vapor-Deposition Method Kuratani N, Murakami Y, Imai O, Ebe A, Nishiyama S, Ogata K Journal of Vacuum Science & Technology A, 15(6), 3086, 1997 |
| 2 |
Study on the Crystallization of Nickel Films Prepared by the Ion-Beam and Vapor-Deposition Method Murakami Y, Kuratani N, Imai O, Ogata K Thin Solid Films, 275(1-2), 61, 1996 |
| 3 |
Study on the Internal-Stress in Nickel Films Deposited Onto Silicon Substrates by Ion-Beam and Vapor-Deposition (Ivd) Kuratani N, Murakami Y, Imai O, Ebe A, Nishiyama S, Ogata K Thin Solid Films, 281-282, 352, 1996 |
| 4 |
Improvement of the Adhesion to Polyimide Substrates of Copper-Films Prepared by an Ion-Beam and Vapor-Deposition (Ivd) Method Ebe A, Takahashi E, Iwamoto Y, Kuratani N, Nishiyama S, Imai O, Ogata K, Setsuhara Y, Miyake S Thin Solid Films, 281-282, 356, 1996 |