검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Study of Internal Linear Inductively Coupled Plasma Source for Ultra Large-Scale Flat Panel Display Processing Lim JH, Kim KN, Gweon GH, Park JB, Yeom GY Plasma Chemistry and Plasma Processing, 29(4), 251, 2009 |
| No. | Article |
|---|---|
| 1 |
Study of Internal Linear Inductively Coupled Plasma Source for Ultra Large-Scale Flat Panel Display Processing Lim JH, Kim KN, Gweon GH, Park JB, Yeom GY Plasma Chemistry and Plasma Processing, 29(4), 251, 2009 |