검색결과 : 1건
No. | Article |
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1 |
Plasma potential measurement in 2.45 GHz electron cyclotron resonance plasma with a magnetron magnetic field configuration Kim SB, Namkung W, Cho M, Kim DC, Yoo SJ Thin Solid Films, 518(22), 6690, 2010 |
No. | Article |
---|---|
1 |
Plasma potential measurement in 2.45 GHz electron cyclotron resonance plasma with a magnetron magnetic field configuration Kim SB, Namkung W, Cho M, Kim DC, Yoo SJ Thin Solid Films, 518(22), 6690, 2010 |