검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Chemical nanoimprint lithography for step-and-repeat Si patterning Namatsu H, Oda M, Yokoo A, Fukuda M, Irisa K, Tsurumi S, Komatsu K Journal of Vacuum Science & Technology B, 25(6), 2321, 2007 |
| No. | Article |
|---|---|
| 1 |
Chemical nanoimprint lithography for step-and-repeat Si patterning Namatsu H, Oda M, Yokoo A, Fukuda M, Irisa K, Tsurumi S, Komatsu K Journal of Vacuum Science & Technology B, 25(6), 2321, 2007 |