화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Crystal morphology of spherical silicon particles produced by jet-splitting method
Kuzuoka Y, Isomae S, Yamaguchi Y
Journal of Crystal Growth, 304(2), 487, 2007
2 Intrinsic gettering of copper in silicon wafers
Isomae S, Ishida H, Itoga T, Hozawa K
Journal of the Electrochemical Society, 149(6), G343, 2002
3 Gravitational stress-induced dislocations in large-diameter silicon wafers studied by X-ray topography and computer simulation
Shimizu H, Isomae S, Minowa K, Satoh T, Suzuki T
Journal of the Electrochemical Society, 145(7), 2523, 1998
4 Cavity Formation Due to Si3N4/SiO2 Film-Induced Stress in Silicon
Isomae S, Tamaki Y
Journal of the Electrochemical Society, 144(1), 340, 1997