화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Talbot lithography: Self-imaging of complex structures
Isoyan A, Jiang F, Cheng YC, Cerrina F, Wachulak P, Urbanski L, Rocca J, Menoni C, Marconi M
Journal of Vacuum Science & Technology B, 27(6), 2931, 2009
2 Progress in extreme ultraviolet interferometric and holographic lithography
Isoyan A, Cheng YC, Jiang F, Wallace J, Cerrinab F, Bollepalli S
Journal of Vacuum Science & Technology B, 25(6), 2145, 2007