검색결과 : 1건
No. | Article |
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1 |
In-Situ Scanning Electron-Microscopy Observation of Hillock and Whisker Growth on Al-Ta Alloy-Films for Interconnections of Thin-Films Transistor Liquid-Crystal Displays Imura E, Ohnishi T, Yoshikawa K, Itayama K Journal of Vacuum Science & Technology A, 12(5), 2922, 1994 |