검색결과 : 3건
No. | Article |
---|---|
1 |
Intrinsic gettering of copper in silicon wafers Isomae S, Ishida H, Itoga T, Hozawa K Journal of the Electrochemical Society, 149(6), G343, 2002 |
2 |
X-Ray Photoelectron-Spectroscopy Study on Native Oxidation of as-Implanted Si (100) Yano F, Hiraoka A, Itoga T, Matsubara A, Kojima H, Kanehori K, Mitsui Y Journal of Vacuum Science & Technology B, 14(4), 2707, 1996 |
3 |
X-Ray Photoelectron-Spectroscopy Study of Submonolayer Native Oxides on HF-Treated Si Surfaces Yano F, Hiraoka A, Itoga T, Kojima H, Kanehori K, Mitsui Y Journal of Vacuum Science & Technology A, 13(6), 2671, 1995 |