화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Intrinsic gettering of copper in silicon wafers
Isomae S, Ishida H, Itoga T, Hozawa K
Journal of the Electrochemical Society, 149(6), G343, 2002
2 X-Ray Photoelectron-Spectroscopy Study on Native Oxidation of as-Implanted Si (100)
Yano F, Hiraoka A, Itoga T, Matsubara A, Kojima H, Kanehori K, Mitsui Y
Journal of Vacuum Science & Technology B, 14(4), 2707, 1996
3 X-Ray Photoelectron-Spectroscopy Study of Submonolayer Native Oxides on HF-Treated Si Surfaces
Yano F, Hiraoka A, Itoga T, Kojima H, Kanehori K, Mitsui Y
Journal of Vacuum Science & Technology A, 13(6), 2671, 1995