검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Internal stress of amorphous carbon nitride films Aono M, Nitta S, Katsuno T, Iuchi T Journal of Vacuum Science & Technology B, 18(3), 1773, 2000 |
| No. | Article |
|---|---|
| 1 |
Internal stress of amorphous carbon nitride films Aono M, Nitta S, Katsuno T, Iuchi T Journal of Vacuum Science & Technology B, 18(3), 1773, 2000 |