검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Formation of nano-columnar amorphous carbon films via electron beam irradiation Aizawa T, Iwamura E, Uematsu T Journal of Materials Science, 43(18), 6159, 2008 |
| 2 |
Effect of aluminium oxide caps on hillock formation in aluminium alloy films Iwamura E, Takagi K, Ohnishi T Thin Solid Films, 349(1-2), 191, 1999 |
| 3 |
Morphology of sputter deposited Al alloy films Onishi T, Iwamura E, Takagi K Thin Solid Films, 340(1-2), 306, 1999 |
| 4 |
Effects of Nd Content in Al Thin-Films on Hillock Formation Onishi T, Iwamura E, Takagi K, Watanabe T Journal of Vacuum Science & Technology A, 15(4), 2339, 1997 |
| 5 |
Influence of Adding Transition-Metal Elements to an Aluminum Target on Electrical-Resistivity and Hillock Resistance in Sputter-Deposited Aluminum-Alloy Thin-Films Onishi T, Iwamura E, Takagi K, Yoshikawa K Journal of Vacuum Science & Technology A, 14(5), 2728, 1996 |
| 6 |
A Study of Hillock Formation on Al-Ta Alloy-Films for Interconnections of TFT-Lcds Iwamura E, Ohnishi T, Yoshikawa K Thin Solid Films, 270(1-2), 450, 1995 |