검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
End-Point Detection by Sputtered Neutral Mass-Spectrometry in Ion Milling of Prepatterned Semiconductor and High-T(C) Superconductor Films Jaekel C, Barth R, Roskos HG, Kurz H Journal of Vacuum Science & Technology A, 12(5), 2830, 1994 |