검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effects of Cobalt Silicidation on the Electrical Characteristics of Shallow P(+)N Junctions Formed by Bf2+ Implantation into Thin Polycrystalline Si Films Lin CT, Chao CH, Juang MH, Jan ST, Chou PF, Cheng HC Journal of the Electrochemical Society, 142(3), 913, 1995 |