검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterization of fluorine-modified organosilicate glass Liu CW, Wang YL, Juang Y, JangJean SK, Lee WH Journal of Vacuum Science & Technology A, 24(6), 2076, 2006 |
| 2 |
Fluorine-modified low-k a-SiOC : H composite films prepared by plasma enhanced chemical vapor deposition JangJean SK, Liu CP, Wang YL, Hwang WS, Tseng WT, Chen SW, Lo KY Thin Solid Films, 447, 674, 2004 |