검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Investigation of macroscopic uniformity during CH4/H-2 reactive ion etching of InP and its improvement by use of a guard ring Janiak K, Niggebrugge U Journal of Vacuum Science & Technology B, 20(1), 105, 2002 |
| 2 |
Reactive Ion Etching of InP/Inalgaas/InGaAs Heterostructures Lemm C, Kollakowski S, Bimberg D, Janiak K Journal of the Electrochemical Society, 144(9), L255, 1997 |