검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effects of Water-Vapor and Chlorine on the Epitaxial-Growth of Si1-xGex Films by Chemical-Vapor-Deposition - Thermodynamic Analysis Lee IM, Jansons A, Takoudis CG Journal of Vacuum Science & Technology B, 15(4), 880, 1997 |
| No. | Article |
|---|---|
| 1 |
Effects of Water-Vapor and Chlorine on the Epitaxial-Growth of Si1-xGex Films by Chemical-Vapor-Deposition - Thermodynamic Analysis Lee IM, Jansons A, Takoudis CG Journal of Vacuum Science & Technology B, 15(4), 880, 1997 |