검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Study of Electron-Beam Patterning of Resist on Tungsten X-Ray Masks Cummings KD, Resnick DJ, Frackoviak J, Kola RR, Trimble LE, Grant B, Silverman S, Haas L, Jennings B Journal of Vacuum Science & Technology B, 11(6), 2872, 1993 |
| 2 |
Patterning Issues of 256Mb Dynamic Random-Access Memory X-Ray Masks Koek B, Jennings B, Grant R Journal of Vacuum Science & Technology B, 11(6), 2876, 1993 |