검색결과 : 2건
No. | Article |
---|---|
1 |
Asymmetric Overhung Resist Profile Fabricated by Optical Lithography Jinbo H, Ito T, Yamashita Y Journal of Vacuum Science & Technology B, 13(6), 2954, 1995 |
2 |
A Novel Technique for Shifter Void Defect Repair by a Focused Ion-Beam Tool Jinbo H, Takushima K, Saito T, Ashida I, Tanaka Y Journal of Vacuum Science & Technology B, 12(6), 3760, 1994 |