검색결과 : 1건
No. | Article |
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1 |
Qualifying ultrathin alumina film prepared by plasma-enhance atomic layer deposition under low temperature operation Bootkul D, Jitsopakul P, Intarasiri S, Boonyawan D Thin Solid Films, 640, 116, 2017 |
No. | Article |
---|---|
1 |
Qualifying ultrathin alumina film prepared by plasma-enhance atomic layer deposition under low temperature operation Bootkul D, Jitsopakul P, Intarasiri S, Boonyawan D Thin Solid Films, 640, 116, 2017 |